Literaturnachweis - Detailanzeige
Autor/in | Lowry, Robert K. |
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Titel | Analytical Chemistry and the Microchip. |
Quelle | In: Analytical Chemistry, 58 (1986) 1, S.23 |
Sprache | englisch |
Dokumenttyp | gedruckt; Zeitschriftenaufsatz |
ISSN | 0003-2700 |
Schlagwörter | Chemical Analysis; Chemistry; College Science; Higher Education; Laboratory Procedures; Microcomputers; Science Education; Spectroscopy |
Abstract | Analytical techniques used at various points in making microchips are described. They include: Fourier transform infrared spectrometry (silicon purity); optical emission spectroscopy (quantitative thin-film composition); X-ray photoelectron spectroscopy (chemical changes in thin films); wet chemistry, instrumental analysis (process chemicals); auger electron spectroscopy (residue identification); and mass spectroscopy (moisture determination). (JN) |
Erfasst von | ERIC (Education Resources Information Center), Washington, DC |